our facilities
- LITHOGRAPHY
- MATERIAL PROCESSING
- ELECTRICAL CHARACTERIZATION
- DIAGNOSTIC
- ETCHING
Ink-Jet (DIMATIX) system for organic devices realization.
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EVAPORATOR FOR ORGANICS (Radac)
Pentacene thin films are obtained in high vacuum chamber (pressure 10-7 mbar) having 200C Radak source. The pentacene purity is 99,9%. |
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EVAPORATOR (EB Gun, Thermal) Balzers 510 The Evaporation System has an electron beam and a thermal evaporation sources. The ultra high vacuum is obtained by a cryopump APD Cryogenics. Mainly used for thin film metal evaporation (Cr, Ti, Au, Ni, Pd, etc) and then for dielectric (SiOx). It is equipped by a Inficon Quartz for thickness and depo rate control. |
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| PE-CVD (Custom Made) |  |
| RTA (Rapid Thermal Annealing Jipelec) |  |
| EXCIMER LASER (LambdaPhisik LPX200) |  |
KARL SUSS PROBE STATION
1.Probe station Suss PM5HF Analytical Probe System for DC e HF electrical measurements of samples up to 6".
2.Probe station for flexible substrates devices measures.
3.Variable Temperature Micro-Probe System by MMR Technologies for electrical measurements of devices in vacuum in a temperature range of 80-580K.
4.Probe station in clean room for samples check during the fabrication process.
UV-VIS SPECTRO PHOTOMETER
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OPTICAL MICROSCOPY
ELLIPSOMETRY
REACTIVE ION ETCHING (Oxford Instruments)
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